| Zugriffsnummer | 11675 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Scanning near-field optical microscopy in the near-infrared spectral range using ion beam treated silicon probes [poster] |
| Autor(in); Institution |
Danzebrink, Hans-Ulrich; 5.12, Mikrotopographie, PTB-Braunschweig
Dziomba, Thorsten; 5.12, Mikrotopographie, PTB-Braunschweig
Lehrer, Christoph; Fraunhofer Institut (IIS-B), Erlangen, GERMANY
Frey, Lothar; Fraunhofer Institut (IIS-B), Erlangen, GERMANY
Sulzbach, Thomas; Nanosensors Dr. Olaf Wolter GmbH, Wetzlar, GERMANY
Ohlsson, Olaf; Nanosensors Dr. Olaf Wolter GmbH, Wetzlar, GERMANY
|
| Quelle/Jahr | Precision engineering - nanotechnology : proceedings of the 1st International EUSPEN conference: 2 (1999), 168 - 171 |
| Schriftenreihe | Berichte aus der Fertigungstechnik |
| Herausgeber(in) |
McKeown, Pat
Kunzmann, Horst; Präsidium, MP, PTB-Braunschweig
|
| ISBN | 3-8265-6085-X |
| Verlag | Aachen: Shaker |
| Konferenzangaben | Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany |
| Zusammenfassung | A scanning near-field optical microscope (SNOM) based on silicon cantilever probes as sensors has been developed. For use in a high-resolution SNOM conventional silicon cantilevers are converted into near-field aperture probes by covering their tip side with an aluminium layer to obtain an opaque coating. To fabricate an aperture, this metal layer is opened at the very end of the pyramidal tip by means of focused ion beams (FIB), thus allowing apertures less than 100 nm in diameter to be created. We describe our concept and show images recorded in transmission mode. Our measurements using near-infrared radiation (λ = 1064 nm) yield a resolution of down to λ/10, with a transmission efficiency in the order of up to 10-3. |
| Rechteinformation | 1999, Shaker |
Zitierung
Danzebrink, H.-U., Dziomba, T., Lehrer, C., Frey, L., Sulzbach, T., & Ohlsson, O. (1999). Scanning near-field optical microscopy in the near-infrared spectral range using ion beam treated silicon probes [poster]. Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany.