| Zugriffsnummer | 11673 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development and characterisation of new probes for dimensional metrology on microsystem components [poster] |
| Autor(in); Institution |
Kleine-Besten, Thomas; 5.11, Maskenmesstechnik, PTB-Braunschweig
Loheide, Stefan; 5.11, Maskenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.11, Maskenmesstechnik, PTB-Braunschweig
Bütefisch, S.; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
Büttgenbach, S.; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | Precision engineering - nanotechnology : proceedings of the 1st International EUSPEN conference: 2 (1999), 387 - 390 |
| Schriftenreihe | Berichte aus der Fertigungstechnik |
| Herausgeber(in) |
McKeown, Pat
Kunzmann, Horst; Präsidium, MP, PTB-Braunschweig
|
| ISBN | 3-8265-6085-X |
| Verlag | Aachen: Shaker |
| Konferenzangaben | Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany |
| Freie Schlagworte | Micrometrology ; dimensional metrology ; 3D coordinate probe ; boss membrane |
| Zusammenfassung | A 3-D probe sensor for dimensional metrology which has been developed using silicon micromachining technology is characterized. The sensing element of the sensor consists of a boss membrane and a sampling needle attached to the boss as tactile component. Piezoresistors are integrated in the diaphragm in order to measure stress caused by a deflection of the boss due to the probing process. The sensor has a 1-D resolution of 2 nm and a repeatability of better than 10 nm. Crosstalk of x-y-z-movements as well as stiffness and contacting forces respectively in x-y-z-direction were measured using a compensation balance modified for this purpose. Furthermore the possible application of this new sensor and a 1-D-Si-AFM-cantilever in a 3-D-micro-coordinate-measurement-machine (CMM) are described. |
| Rechteinformation | 1999, Shaker |
Zitierung
Kleine-Besten, T., Loheide, S., Brand, U., Bütefisch, S., & Büttgenbach, S. (1999). Development and characterisation of new probes for dimensional metrology on microsystem components [poster]. Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany.