| Zugriffsnummer | 11670 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Nanometre scale transfer standards |
| Autor(in); Institution |
Garnæes, J.; Danish Institute of Fundamental Metrology, Lyngby, DENMARK
Kofod, N.; Danish Institute of Fundamental Metrology, Lyngby, DENMARK
Jørgensen, J. F.; Danish Institute of Fundamental Metrology, Lyngby, DENMARK
Kühle, A.; Danish Institute of Fundamental Metrology, Lyngby, DENMARK
Besmens, S.; Nanosensors, Wetzlar, GERMANY
Ohlsson, O.; Nanosensors, Wetzlar, GERMANY
Rasmussen, J. B.; Ibsen Micro Structures, Farum, DENMARK
Lindelof, P. E.; University of Copenhagen, Niels Bohr Institute, Copenhagen, DENMARK
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.12, Mikrotopographie, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Haycocks, J.; National Physical Laboratory, Teddington, UK
Nunn, J.; National Physical Laboratory, Teddington, UK
Stedman, M.; National Physical Laboratory, Teddington, UK
|
| Quelle/Jahr | Proceedings of the 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen. Vol. 2:(1999), 134 - 137 |
| Herausgeber(in) |
McKeown, Pat
Kunzmann, Horst; Präsidium, MP, PTB-Braunschweig
|
| ISBN | 3-8265-6085-X |
| Verlag | Aachen: Shaker |
| Konferenzangaben | Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany |
| Freie Schlagworte | Scanning Probe Microscopy ; Calibration ; Standards |
| Zusammenfassung | Three national metrology laboratories and two firms are engaged in a concerted (EU supported) effort to produce and certify nanometer scale transfer standards which can be used to calibrate the three orthogonal axes of an scanning probe microscope (SPM). The standards will range from step heights of 8 nm to nm and pitch distances from 30 nm to nm. The calibration standards are supplied with a software algorithm for the calculation of calibration parameters and their associated uncertainties. |
Zitierung
Garnæes, J., Kofod, N., Jørgensen, J. F., Kühle, A., Besmens, S., Ohlsson, O., Rasmussen, J. B., Lindelof, P. E., Wilkening, G., Koenders, L., Mirandé, W., Hasche, K., Haycocks, J., Nunn, J., & Stedman, M. (1999). Nanometre scale transfer standards. Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany.