| Zugriffsnummer | 11234 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | A novel three-axis silicon probe with integrated circuit on chip for microsystem components [poster] |
| Autor(in); Institution |
Nesterov, Vladimir; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Pornnoppadol, Petcharin; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Wilke, R.; IMT Braunschweig, Braunschweig, GERMANY
Schmidt, M.; IMT Braunschweig, Braunschweig, GERMANY
Büttgenbach, S.; IMT Braunschweig, Braunschweig, GERMANY
|
| Quelle/Jahr | Smart sensors, actuators, and MEMS : 19 - 21 May 2003, Maspalomas, Gran Canaria, Spain:(2003), 844 - 849 |
| Schriftenreihe | Proceedings of SPIE: 5116,2 |
| Herausgeber(in) |
Chiao, Jung-Chih
|
| ISSN | 0277-786X |
| ISBN | 0-8194-4976-8 |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | First International Symposium on Microtechnologies for the New Millennium 2003, Maspalomas, Gran Canaria, 19-21, May, 2003, Spain |
| Freie Schlagworte | membrane ; CMM ; micro probe ; Wheatstone bridge |
| Zusammenfassung | A three-axis micro probe with wiring of the piezoresistors to Wheatstone bridges on the silicon membrane was currently developed for application in high precision coordinate measuring machines (CMM). The methods and results of the experimental investigation of the main properties of the 3d micro probe are presented. The influence of temperature and light onto the probe performance is described. Finally a brief outlook on the optimisation of the threshold sensitivity is given. |
Zitierung
Nesterov, V., Pornnoppadol, P., Brand, U., Wilke, R., Schmidt, M., & Büttgenbach, S. (2003). A novel three-axis silicon probe with integrated circuit on chip for microsystem components [poster]. First International Symposium on Microtechnologies for the New Millennium 2003, Maspalomas, Gran Canaria, 19-21, May, 2003, Spain.