| Zugriffsnummer | 11230 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Three-dimensional microprobe with reduced probing forces [poster] |
| Autor(in); Institution |
Pornnoppadol, Petcharin; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Cao, Shizhi; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Schmidt, M.; IMT Braunschweig, Braunschweig, GERMANY
Wilke, R.; IMT Braunschweig, Braunschweig, GERMANY
Bütefisch, S.; IMT Braunschweig, Braunschweig, GERMANY
Nesterov, Vladimir; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 737 - 740 |
| Herausgeber(in) |
Delbressine, F. L. M.
|
| ISBN | 90-386-2883-8 |
| Verlag | Eindhoven: Universiteitsdrukkerij TU Eindhoven |
| Konferenzangaben | Euspen, Eindhoven, 26-30, May, 2002, The Netherlands |
| Freie Schlagworte | probing forces ; probing system ; spring constant |
| Zusammenfassung | A three dimensional microprobe for dimensional measurements of micro structures based on a silicon boss-membrane has been further developed in order to reduce the probing forces and to minimise its size. Reduction of probing forces is achieved by using stripe membranes instead of full membranes. The size of the new probing system could be successfully reduced by integrating the wiring of the piezoresistors on the membrane and using spring contact pins. |
