| Zugriffsnummer | 10587 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Recent development in absolute interferometry using two diode lasers |
| Autor(in); Institution |
Wu, Jian; 5.4, Längenmaße und -messmittel, PTB-Braunschweig
Meiners-Hagen, Karl; 5.4, Längenmaße und -messmittel, PTB-Braunschweig
Burgarth, Volker; 5.4, Längenmaße und -messmittel, PTB-Braunschweig
Abou-Zeid, Ahmed; 5.4, Längenmaße und -messmittel, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 4th euspen International Conference : May 31st - June 2nd 2004, Glasgow, Scotland, UK:(2004), 278 - 279 |
| Herausgeber(in) |
European Society for Precision Engineering and Nanotechnology
|
| ISBN | 1-861-94108-0 |
| Verlag | Bedford: European Society for Precision Engineering and Nanotechnology |
| Konferenzangaben | 4th International Conference of the European Society for Precision Engineering and Nanotechnology, Glasgow, 31, May - 2, June, 2004, Scotland |
| Zusammenfassung | In the former report, a linearity of ±10μm in the range of 2m was achieved with data averaging over 10 minutes for our absolute interferometry setup. In this paper, influence of the quality of F-P signal is discussed. And new improvements including Fabry-Perot (F-P) peak number correction and reference interferometer compensation are performed. 6-micron stability over 12 hours is realized with 200-data averaging. Absolute distance is measured and measuring linearity of 8 micron over 0.8-meter range is achieved with calibration to a reference Michelson interferometer. |
Zitierung
Wu, J., Meiners-Hagen, K., Burgarth, V., & Abou-Zeid, A. (2004). Recent development in absolute interferometry using two diode lasers. 4th International Conference of the European Society for Precision Engineering and Nanotechnology, Glasgow, 31, May - 2, June, 2004, Scotland.