| Zugriffsnummer | 10522 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Force calibration of stylus instruments using silicon microcantilevers |
| Autor(in); Institution |
Peiner, Erwin; TU Braunschweig, Institut für Halbleitertechnik, Braunschweig, GERMANY
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Digest of technical papers. Eurosensors XVIII, 18th European Conference on Solid-State Sensors:(2004), 174 - 175 [print. ed.]; [CD-ROM] file name: C5_1.pdf |
| Herausgeber(in) |
DiNatale, C.
|
| Verlag | Roma: |
| Konferenzangaben | Eurosensors XVIII, Rome, September 12-15, 2004, Italy |
| Freie Schlagworte | cantilever sensor ; integrated probing tip ; piezoresistive strain gauge ; force calibration ; surface ; profiler |
| Zusammenfassung | The transfer of force standard to tactile probing instruments using a silicon cantilever sensor is described. High-precision load-deflection measurements revealed high accuracy and reproducibility of realised devices. A novel procedure is presented by which the force setting of a surface profiler can be referred to the deflection and strain curves generated by tracing a μN and from 1 μN to 200 μN at uncertainties of ± 0.4 % and of ±1.1 % by the evaluation of deflection and strain curves, respectively. |
