| Zugriffsnummer | 10445 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development of a new stylus contacting system for roughness measurement |
| Autor(in); Institution |
Thomsen-Schmidt, Peter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Krüger-Sehm, Rolf; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wolff, Helmut; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | XI. International Colloquium on Surfaces: Proceedings. Part 1:(2004), 79 - 85 |
| Herausgeber(in) |
Dietzsch, M.
|
| ISBN | 3-8322-2418-1 |
| Verlag | Aachen: Shaker |
| Konferenzangaben | XI. International Colloquium on Surfaces (ICS), Chemnitz, 2-3, February, 2004, Germany |
| Freie Schlagworte | contact stylus instrument ; surface topography measurement calibration |
| Zusammenfassung | A high resolution measurement probe for two dimensional surface topography characterisation is developed. The tip holder is a cylindrical pin guided by two air bearings, with a small magnet inside for weight compensation by an external magnetic field. A ferrous splint is used as a twisting protection in combination with an external magnetic field. Displacement of the stylus perpendicular to the surface under test is detected by a differential inductive transducer. By this arrangement the stylus of the instrument has during the measurement no mechanical contact to its environment but only that of the tip to the surface. One goal of the development is to minimise the number of necessary steps for calibration of the z-axis. Due to the fact that the tip holder is moving along a straight line for direct traceability a mirror for an interferometer is attached on the upper end of the tip holder. First results about the dynamical properties, tilting behaviour, noise and stability of the system are reported. |
