| Zugriffsnummer | 10440 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Lateral & vertical calibration of Scanning Probe Microscopes and their measurement uncertainty |
| Autor(in); Institution |
Dziomba, Thorsten; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | XI. International Colloquium on Surfaces: Proceedings. Part 2:(2004), 117 - 128 |
| Herausgeber(in) |
Dietzsch, M.
|
| ISBN | 3-8322-2419-X |
| Verlag | Aachen: Shaker |
| Konferenzangaben | XI. International Colloquium on Surfaces (ICS), Chemnitz, 2-3, February, 2004, Germany |
| Freie Schlagworte | SPM calibration ; photomask measurements |
| Zusammenfassung | With the increasing use of Scanning Probe Microscopes (SPMs) as quantitative measurement instruments in many applications, the demand for standardized calibration routines for this type of instruments rises. A number of transfer standards suited for SPMs has already been developed for this purpose and are commercially available. While detailed knowledge of the standards’ properties is a prerequisite for their practical application, the calibration procedure itself also deserves careful consideration. Up to now, there is no generally accepted guideline on how to perform SPM calibrations. This paper therefore focuses on several critical aspects of SPM calibration, e. g. the physical properties of instrumentation and the possible error sources that need to be taken into account when plotting a scheme for calibration. Special attention is devoted to the measurement conditions as they play an extra-ordinarily crucial role in SPM calibration. Some aspects of SPM characterization are illustrated by the example of an SPM system used for photomask measurements in the PTB cleanroom center. |
