| Zugriffsnummer | 10153 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Is the effective accommodation coefficient of the spinning rotor gauge temperature dependent? |
| Autor(in); Institution |
Jousten, Karl; 7.23, Vakuummetrologie, PTB-Berlin
|
| Quelle/Jahr | Journal of Vacuum Science and Technology A: 21 (2003), 1, 318 - 324 |
| ISSN | 0734-2101 |
| DOI | |
| Verlag | New York, NY: AIP |
| Klassifikationscode | PACS: 07.30.Dz ; PACS: 06.20.Fn ; PACS: 68.43.-h |
| Zusammenfassung | The spinning rotor gauge (SRG) used as a vacuum gauge for the range 10-4 Pa to 1Pa shows good long term stability. Therefore it is widely used as a reference standard in calibration services. The calibration constant of the SRG is the effective accommodation coefficient with values around 1. This effective accommodation coefficient of the gas particles to the rotor is considered temperature independent for the normal operational temperatures 18°C to 30°C. We have carried out investigations that show that is slightly temperature dependent both for a baked and an unbaked rotor and vacuum system. The investigated temperature range was 16°C to 40°C. Relative changes of varied from 1 x 10-4/K to 4 x 10-4/K. As reason for the temperature dependence we could exclude neither a temperature dependent change of H2O coverage of the rotor nor a temperature dependence of the energy accommodation coefficient. |
