| Zugriffsnummer | 10147 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Traceable calibration standard for the lateral axis of contact stylus instruments |
| Autor(in); Institution |
Krüger-Sehm, Rolf; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Häßler-Grohne, Wolfgang; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Frühauf, J.; TU Chemnitz, Chemnitz, GERMANY
|
| Quelle/Jahr | Proceedings of the 9th Conference on Metrology and Properties of Engineering Surfaces:(2004), 7 - 14 |
| Herausgeber(in) |
Rosén, B.-G.
|
| ISBN | 91-631-5455-2 |
| Verlag | Halmstad: Univ. |
| Konferenzangaben | Proceedings of the 9th International Conference on Metrology and Properties of Engineering Surfaces, Halmstadt, 10-11, September, 2003, Sweden |
| Freie Schlagworte | calibration ; lateral standard ; contact stylus instruments ; traceability ; uncertainty of measurement |
| Zusammenfassung | The development of a lateral standard is described which provides traceability of the scaling of the horinzontal axis of contact stylus instruments to the unit of length. Tracing of the standard by the contacting system is included in the calibration. The standard is provided with several periodic line scales fabricated by wet etching in silicon in dependence on the crystal orientation. The way the line scales are realized allows for the conditions of measurement and evaluation defined by the GPS standards ISO 5436-1 /6/, ISO 3274 /5/, ISO 4287 /7/, ISO 4288 /8/ and ISO 12179 /9/ with respect to the calibration. Furthermore, the design of the standard takes account of manufacturing aspects as well as of the requirements made by the optical contacting system of the mask comparator which serves to carry out the traceable calibration of the lateral standard. The transfer of the unit of length to the contact stylus instrument takes place via the mean line spacing of the scale for the determination of which the algorithm defined in ISO 4287 for the roughness parameter RSm is used. Owing to the optimum organization of all steps of the dissemination sequence, this measurand can be transferred with an uncertainty of approx. 500 nm. |
Zitierung
Krüger-Sehm, R., Häßler-Grohne, W., & Frühauf, J. (2004). Traceable calibration standard for the lateral axis of contact stylus instruments. Proceedings of the 9th International Conference on Metrology and Properties of Engineering Surfaces, Halmstadt, 10-11, September, 2003, Sweden.