| Zugriffsnummer | 10091 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Deducing light scatter from AFM-measurements |
| Autor(in); Institution |
Hahlweg, Cornelius; University of the Federal Armed Forces, Hamburg, GERMANY
Rinder, T.; University of the Federal Armed Forces, Hamburg, GERMANY
Thomsen-Schmidt, Peter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Groh, C.; University of the Federal Armed Forces, Hamburg, GERMANY
Rothe, H.; University of the Federal Armed Forces, Hamburg, GERMANY
|
| Quelle/Jahr | Surface scattering and diffraction III: 4 - 6 August 2003, San Diego, California, USA:(2003), 108 - 115 |
| Schriftenreihe | Proceedings of SPIE: 5189 |
| Herausgeber(in) |
Gu, Zu-Han
|
| ISBN | 0-8194-5062-6 |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE International Symposium on Optical Science and Technology, SPIE's 48th Annual Meeting, San Diego, Calif., 3-8, August, 2003, USA |
| Freie Schlagworte | light scattering ; discrete sources ; multi pole method ; AFM |
| Zusammenfassung | For the numerical prediction of the scattering behaviour of arbitrary surfaces the use of a multi pole method is a potentially successful way. One reason is its direct addressing of the free space problem, which is is primary not possible with methods such as FEM. For purposes of verification with a reduced set of degrees of freedom the multi pole method is applied on gold plated blazed optical gratings, which are described as surfaces with one-dimensional height function and ideally conductive boundary, leading to a 2D-problem with a simplified matching of the boundary conditions. The geometry is deduced from AFM measurements, numerical results are compared with the measurements. An outlook is given on further extensions of the multipole method to 3D-problems with arbitrary boundary conditions such as dielectric layers with losses. |
