| Zugriffsnummer | 10071 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Piezoresistive cantilever for micro force calibration |
| Autor(in); Institution |
Peiner, Erwin; TU Braunschweig, IHT, Braunschweig, GERMANY
Behrens, Ingo; TU Braunschweig, IHT, Braunschweig, GERMANY
Doering, Lutz; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
|
| Quelle/Jahr | SENSOR 2003 : 11th international conference: 1 (2003), 243 - 248 |
| Herausgeber(in) |
AMA Fachverband für Sensorik e.V.
|
| Verlag | Wunstorf: AMA Service Ges. |
| Konferenzangaben | SENSOR 2003 Conference, Nürnberg, 13-15, Mai, 2003, Germany |
| Freie Schlagworte | Integrated processes (micromachining, micromolding, ...) ; Micro-Nano Integration ; Packaging of microdevices (MEMS, MOEMS, microfluidic, sensors) ; Manufacturing of microsystems ; Testing of microsystems and devices |
| Zusammenfassung | Design, fabrication and test of a silicon cantilever for active micro force calibration is described. The cantilever comprises a probing tip at its free end and a piezoresistive strain gauge at its suspension. It is realised using a low-cost bulk micromachining process. Testing is performed using a high-resolution micro-force measuring device which revealed a very linear relationship between the gauge output voltage and the probing force. The residual of a linear fit to the measured data in the range between 20 μN and 180 μN is less than ± 0.6 μN. |
